Professor Milo KralProfessor Milo Kral
University of Canterbury, New Zealand

Introduction to Analytical Electron Microscopy

Abstract

Transmission electron microscopes are powerful platforms for materials characterization. Recent developments in aberration correction have allowed resolution of single atoms. Defects such as dislocations and grain boundaries are easily resolved and characterized. Specimen/beam interactions also produce numerous signals that can be detected to produce local information about composition. The techniques relevant to study of defects in semiconductors will be discussed. In addition, the various methods of specimen preparation will be presented. The overall scope of the presentation is a broad overview of TEM-based methods that will assist researchers in their characterization of semiconductor materials.

Professor Kral received his B.E. in Mechanical Engineering from Vanderbilt University in Nashville TN (1984) and then worked at the Rochester Products Division of General Motors in Rochester NY for the following 6 years. In 1989, he returned to Vanderbilt for his M.Sc. (1992) and Ph.D. (1996) in Materials Science and Engineering. In 1996, Milo was awarded an ASEE postdoctoral fellowship for two years in the Physical Metallurgy Branch at the US Naval Research Laboratory in Washington DC. In 1998, he was appointed to the faculty of engineering University of Canterbury, Christchurch New Zealand, where he has spent the past 12 years and currently holds the rank of Professor in Mechanical Engineering, where he is also Head of Department.
 
His primary research interests are in the area of structure-property-processing relationships in structural metals with an emphasis on characterization techniques, particularly analytical transmission and scanning electron microscopy.  Prof. Kral’s publications include chapters in Volume 9 and 22B of the Metals Handbook series.